About Us


Leuven Instruments strives to provide the latest 12-inch and 8-inch equipment and process solutions for integrated circuit (IC) fabrication facilities (fabs). Our plasma etching, thin film deposition, and vapor phase decomposition systems help fabs process the core layers of devices in logic, memory, power electronics, optics, and micro-display.


Additionally, Leuven Instruments' LMEC-300™ Special Metal Stack Etching Cluster offers world-class process capabilities for emerging memory devices. This lays the groundwork for the mass production of magneto-resistive random access memory (MRAM), resistive RAM (ReRAM), and phase change RAM (PCRAM).

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