RIE, IBE, PECVD
12" Special Metal Stack Etching Cluster
ICP
12" Metal Hardmask Opening System
ICP, Strip
12" Metal Etching System
8" Silicon Etching System
8" Metal Etching System
8" Inductively Coupled Plasma Etching System
8" Inductively Coupled Plasma - Deep Silicon Etching System
CCP
6" Capacitively Coupled Plasma Etching System
IBE
12" Ion Beam Etching System
8" Ion Beam Etching System
