RIE, IBE, PECVD
12" Special Metal Stack Etching Cluster
ICP
12" Metal Hardmask Opening System
ICP, Strip
12" Metal Etching System
8” Silicon Etching System
8” Metal Etching System
CCP
Capacitively Coupled Plasma Etching System
8" Inductively Coupled Plasma Etching System
8” Inductively Coupled Plasma - Atomic Layer Etching System
8” Inductively Coupled Plasma - Deep Reactive Ion Etching System
IBE
12" Ion Beam Etching System
RIBE
12" Reactive Ion Beam Etching System
8" Ion Beam Etching System
8" Reactive Ion Etching System