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LMEC-300™

RIE, IBE, PECVD

12" Special Metal Stack Etching Cluster

Herent® Chimera® A

ICP

12" Metal Hardmask Opening System

Herent® Chimera® M

ICP, Strip

12" Metal Etching System

Tebaank™ Pishow® P

ICP

8" Silicon Etching System

Kessel™ Pishow® M

ICP, Strip

8" Metal Etching System

Kessel™ Pishow® M2

ICP, Strip

8" Metal Etching System

Pishow® A Series

ICP

8" Inductively Coupled Plasma Etching System

Pishow® D Series

ICP

8" Inductively Coupled Plasma - Deep Silicon Etching System

Haasrode® Avior® A

CCP

6" Capacitively Coupled Plasma Etching System

Pangea® A Series

IBE

12" Ion Beam Etching System

Lorem® A Series

IBE

8" Ion Beam Etching System

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