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LMEC-300™

RIE, IBE, PECVD

12" Special Metal Stack Etching Cluster

Herent® Chimera® S

ICP

12" Metal Hardmask Opening System

Herent® Chimera® M

ICP, Strip

12" Metal Etching System

Terbank™ Pishow® P

ICP

8” Silicon Etching System

Kessel™ Pishow® M

ICP, Strip

8” Metal Etching System

Haasrode® Avior®

CCP

Capacitively Coupled Plasma Etching System

Pishow® Series

ICP

8" Inductively Coupled Plasma Etching System

Pishow® A Series

ICP

8” Inductively Coupled Plasma - Atomic Layer Etching System

Pishow® D Series

ICP

8” Inductively Coupled Plasma - Deep Reactive Ion Etching System

Pangea® Series

IBE

12" Ion Beam Etching System

Pangea® R Series

RIBE

12" Reactive Ion Beam Etching System

Lorem® Series

IBE

8" Ion Beam Etching System

Lorem® R Series

RIBE

8" Reactive Ion Etching System

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