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LMEC-300™

RIE, IBE, PECVD

12" Special Metal Stack Etching Cluster

Herent™ Chimera™

ICP

12" Metal Hardmask Opening System

Herent™ Chimera™ M

ICP, Strip

12" Metal Etching System

Terbank™ Pishow™ P

ICP

8” Silicon Etching System

Kessel™ Pishow™ M

ICP, Strip

8” Metal Etching System

Haasrode™ Avior™

CCP

Capacitively Coupled Plasma Etching System

Pishow™ Series

ICP

8" Inductively Coupled Plasma Etching System

Pishow™ A Series

ICP

8” Inductively Coupled Plasma - Atomic Layer Etching System

Pishow™ D Series

ICP

8” Inductively Coupled Plasma - Deep Reactive Ion Etching System

Pangea™ Series

IBE

12" Ion Beam Etching System

Pangea™ R Series

RIBE

12" Reactive Ion Beam Etching System

Lorem™ Series

IBE

8" Ion Beam Etching System

Lorem™ R Series

RIBE

8" Reactive Ion Etching System

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